Epitaxy of III-V compounds - A lecture covering HVPE, MOVPE and MBE
Guest Speaker：Professor Sebastian Lourdudoss ，KTH – Royal Institute of Technology, Stockholm, Sweden
Inviter: Prof. Peng Zhang
Date&Time: Thursday, 27.March, 15:00-17:30
Venue: Yiucheng Lecture Hall（500），Xu Zuyao Building
Biography:
Professor Sebastian Lourdudoss obtained his Ph.D. in chemistry from Faculté Libre des Sciences de Lille, France, in 1979. In 1980 he joined KTH, Stockholm, Sweden, to work on chemical absorption heat pumps and thermochemical energy storage. He changed his field of interest to semiconductors in 1985 when he had moved to Swedish Institute of Microelectronics, where he started to develop epitaxy of III-V compound semiconductors for fabricating optoelectronic devices. In 1993 he moved back to KTH and became a professor in Semiconductor Materials in 2002. He has contributed to the development of semi-insulating III-V materials including III-nitrides for discrete and integrated device fabrication and buried heterostructure lasers for high-speed data- and telecom applications. During his later years prior to his retirement in July 2021, he has been concentrating particularly on the integration of III-Vs on silicon, high power buried heterostructure quantum cascade lasers and semiconductors for non-linear applications. He held several positions including Director of Ph.D. studies and Head of Department in KTH. Currently he is an emeritus professor at KTH. He has published over 330 articles in reputed international journals and conferences. He has also edited 2 books and special issues of 7 journals and holds 2 patents.
Prof. Lourdudoss was a laureate of Fondation de France, Paris in 1978, a team member that won “gold foot” from Nyteknik (New Technique) magazine for the breakthrough in Information Technology in 1999 and a winning team member of an innovation program Vinn nu (Win now) from Vinnova (Sweden’s Innovation Agency) in 2013. He was the recipient of IPRM (Indium Phosphide and Related Materials) award in 2017. He was Sir C.V. Raman visiting professorship lecturer at University of Madras in 2018. He is also acting as an overseas professor at Anna University, Chennai, India, an Adjunct Professor at Vellore Institute of Technology (VIT), Vellore, India and a visiting professor at SRM University, Chennai, India. Prof. Lourdudoss is a member of SPIE and a senior member of IEEE.
Abstract:
The lecture will deal with the basic operation principles of three major epitaxial techniques such as Hydride Vapour Phase Epitaxy (HVPE), Metal Organic Vapour Phase Epitaxy (MOVPE) and Molecular Beam Epitaxy (MBE) to grow III-V compound semiconductors. It will highlight that these techniques are associated with thermodynamically controlled mass transport, diffusion-controlled mass transport and kinetically controlled mass transport processes, respectively. Thermodynamics-guided growth diagrams will be presented. After this lecture, the student will be able to appreciate uniqueness of each of these techniques and can make an appraisal on the choice of the technique for his/her applications. Ample examples of the device structures fabricated by these techniques will also be given.
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